Overview VAIS-PMT is the world's exclusive pneumatic active anti-vibration isolator integrated with anti-noise chamber. Nano scale measurement instruments are vulnerable not only to floor structural vibration, but also to acoustical vibration and air flow. The VAIS-PMT's active anti-vibration system and anti-noise shield system effectively eliminate such factors.
VAIS-PMT provides consistently stable vibration environment with pneumatic active anti-vibration frame against even aperiodic impulse vibration input. Anti-noise chamber with multi-layer soundproof walls block air-flow nearby HAVC equipment and noise.
With high damped pneumatic support frame, VAIS-PMT shows superior robustness against aperiodic impulse vibration.
Utilizing feedback and floor feed-forward control, VAIS-PMT has excellent capability to prevent low-frequency vibration disturbance, a common issue with passive anti-vibration systems.
Three LED lights (Red, Green, Blue) on the front panel conveniently inform the user of the vibration environment change and seviceability.
Through remote control, VAIS-PMT provides optimal control parameters and inspection of abnormalities without engineer's vitis
Anti-noise chamber with 6 layers wall structures of VAIS-PMT perfectly removes air-borne disturbances by air flow and acoustical noise.
| Sandard Dimension | 610(W) X 730(L) X 895(H) [mm] | |
| Platform Type | Granite (standard) / Optical breadboard (option) | |
| Loadable Range | 0 ~ 150kg (standard) | |
| Support Frame | Pneumatic(compressed air) spring | |
| Control DOFs | 3 axis 6 DOFs (full active system) | |
| Control Range | 0.5 ~ 1,000 Hz | |
| Control Type | Feedback & Floor Feed-Forward Control | |
| Air pressure | over 0.5 MPa | |
| Power Supply | AC 90 ~ 230V / 50 ~ 60Hz | |
| Resonance range ( >1 Hz ) | Not Existed |
| Isolation efficiency on frequency domain | |
| 2 Hz | -10dB (60% isolation) |
| 5 Hz | -30dB (85% isolation) |
| 10 Hz | -40dB (99% isolation) |
| 20 Hz ~ | -40dB (99% isolation) |
| Frequency | Noise Reduction | Frequency | Noise Reduction |
| 63 Hz | 14 dB | 1000 Hz | 41 dB |
| 125 Hz | 28 dB | 2000 Hz | 41 dB |
| 250 Hz | 29 dB | 4000 Hz | 42 dB |
| 500 Hz | 32 dB | 8000 Hz | 44 dB |
(1) Structure-borne noise (vibration) has comparatively longer wave length and stronger energy, which makes it especially important to isolate them.
(2) While air-borne vibration and acoustical vibration(noise) transmit smaller energy to the target instruments, they are transmtted directly to a microscope's measurement spot and greatly distort microscope image.
Air flow from nearby HVAC systems also greatly affects the microscope.
(3) VAIS-PMT single-handedly prevents floor vibrations, air-borne noises and air-flow for optimal nano-scale measurement.
