Overview The pneumatic passive anti-vibration system, which is widely used to block the vibration applied around the electron microscope's installation site, amplifies the vibration due to the resonance phenomenon in low-frequency region. Even in the case of a normal SEM, which is relatively robust against vibration disturbance, the resonance phenomenon in low-frequency region may affect IEST VC-E Class's vibration environment, the minimum vibration state for optimal operation of an electron microscope.
VAIS-CMT is a full active anti-vibration system incorporating 3 axis-6 degree of freedom control technology to eliminate pneumatic passive vibration isolator's resonance issue.
Since a metal coil spring frame supports it, VAIS-CMT needs no compressed air supplier. The lower height of VAIS-CMT improves inconvenience that the pneumatic passive anti-vibration system causes.
With a competitive price, it will be the best anti-vibration solution for normal SEMs.
Supported by metal coil springs, VAIS-CMT requires no compressed air supplier.
It can be conveniently transported and installed anywhere with electricity.
Utilizing feedback and floor feed-forward controls, VAIS-CMT has an excellent capability to prevent low-frequency vibration disturbance, an common issue with passive anti-vibration systems.
Three LED lights (Red, Green, Blue) on the front panel conveniently display the status on vibration environment changes and seviceability.
Digitally-controlled VAIS-CMT is designed for convenient self-diagnosis of operation-related malfunctions, such as center of gravity changes.
AMTEK provides a remote real-time support for convenient performance diagnosis and technical support.
| Model Type | CMT-067 | CMT-078 | |
| Dimension [mm] | 596(W)X696(L)X125(H) | 696(W)X796(L)X125(H) | |
| Self-Weight [kg] | 65 | 85 | |
| Loadable Weight [kg] | 0 ~ 300 | ||
| Control Range [Hz] | 0.5 ~ 1,000 | ||
| Control Type | Feedback & Floor Feed-Forward Control | ||
| Settling time | Below 0.5 second | ||
| Actuator Force | Vertical : 12N / Horizontal : 6N | ||
| Input Voltage | 50~230V (50Hz~60Hz) | ||
| Control range | 0.5 ~ 1,000 Hz |
| Isolation efficiency(Isolation performance) on frequency domain | |
| 2 Hz | -10dB (60%) |
| 5 Hz | -30dB (93%) |
| 10 Hz | -30dB ~ -35dB (95%) |
| Over 20 Hz | -35dB (95%) |
(1) The pneumatic passive anti-vibration system, widely used in heavy-load micro-analysis with a high center of gravity, has a resonance problem occuring at frequencies below 10Hz, which makes it difficult to archieve the target resolution of the equipment.
(2) VAIS-CMT eliminates the resonance problem and completely blocks the vibration disturbance transmitted from the surrounding vibration sources.
(3) By applying a coil spring support frame, it does not require a compressed air supplier and has a lower height compared to the pneumatic passive isolator, thus reducing the inconvenience of operating the target instruments
(4) VAIS-CMT has significantly superior isolation performance, conveniences and price competitiveness
