Overview The pneumatic passive anti-vibration system, which is widely used to block the vibration applied around the electron microscope's installation site, amplifies the vibration due to the resonance phenomenon in low-frequency region. Even in the case of a normal SEM, which is relatively robust against vibration disturbance, the resonance phenomenon in low-frequency region may affect IEST VC-E Class's vibration environment, the minimum vibration state for optimal operation of an electron microscope.
VAIS-CMT is a full active anti-vibration system incorporating 3 axis-6 degree of freedom control technology to eliminate pneumatic passive vibration isolator's resonance issue.
Since a metal coil spring frame supports it, VAIS-CMT needs no compressed air supplier. The lower height of VAIS-CMT improves inconvenience that the pneumatic passive anti-vibration system causes.
With a competitive price, it will be the best anti-vibration solution for normal SEMs.
Supported by metal coil springs, VAIS-CMT requires no compressed air supplier.
It can be conveniently transported and installed anywhere with electricity.
Utilizing feedback and floor feed-forward controls, VAIS-CMT has an excellent capability to prevent low-frequency vibration disturbance, an common issue with passive anti-vibration systems.
Three LED lights (Red, Green, Blue) on the front panel conveniently display the status on vibration environment changes and seviceability.
Digitally-controlled VAIS-CMT is designed for convenient self-diagnosis of operation-related malfunctions, such as center of gravity changes.
AMTEK provides a remote real-time support for convenient performance diagnosis and technical support.
|Loadable Weight [kg]||0 ~ 300|
|Control Range [Hz]||0.5 ~ 1,000|
|Control Type||Feedback & Floor Feed-Forward Control|
|Settling time||Below 0.5 second|
|Actuator Force||Vertical : 12N / Horizontal : 6N|
|Input Voltage||50~230V (50Hz~60Hz)|
|Control range||0.5 ~ 1,000 Hz|
|Isolation efficiency(Isolation performance) on frequency domain|
|2 Hz||-10dB (60%)|
|5 Hz||-30dB (93%)|
|10 Hz||-30dB ~ -35dB (95%)|
|Over 20 Hz||-35dB (95%)|