Inspection equipment installed on semiconductor production lines is continuously exposed to harsh vibrations from surrounding sources and extreme noise environments.

In addition to a quiet noise and vibration environment, maintaining a certain level of cleanliness and temperature stability is essential for chambers used with inspection equipment in cleanrooms.

The VAIS-SEi is a patented soundproof chamber designed to maintain internal cleanliness and stable temperature conditions.

Combining an active vibration isolation system with temperature control and cleanliness management functions, the VAIS-SEi ensures optimal environmental conditions even under the most demanding operating environments.

1. 6-Layer Shielding Structure

A quiet acoustic environment is achieved through a six-layer configuration of sound-absorbing and sound-insulating materials, effectively blocking the harsh noise conditions of cleanroom environments.

2. Cleanliness Control

The patented Fan Filter Unit (FFU) system maintains the required level of cleanliness inside the chamber while eliminating fan-generated noise interference.

3. Temperature Control System

An integrated chiller system prevents temperature rise within the enclosed space, ensuring consistent internal temperature despite heat generated by installed equipment.

4. Vibration Isolation System

Incorporating AMTEK's active vibration control technology, the system perfectly isolates vibration disturbances transmitted from the surrounding installation environment.