VAIS-PB Hero Image

VAIS-PB

Pneumatic active anti-vibration system
for SEM, TEM, FIB

Active isolator for high load (VAIS-PB)

Electron microscopes are inherently sensitive to vibration disturbances transmitted through solid structures.
Passive vibration isolation tables, which have structural resonance zones, can critically compromise the performance of high-resolution electron microscopes by amplifying these disturbances.

VAIS-PB is an "active vibration isolation table specifically optimized for electron microscopes", designed to eliminate vibration amplification caused by resonance.

Incorporating a pneumatic support frame with excellent damping characteristics, VAIS-PB ensures stable vibration isolation even under impact vibrations, outperforming competitor models that rely on metal spring support systems.

Since its successful commercialization in 2014—the first of its kind in Korea—VAIS-PB has been widely adopted by major electron microscope manufacturers both domestically and internationally, proving its superior performance.

Specifications

1. Pneumatic Support Frame

The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Automatic Height Adjustment

Equipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.

5. Remote Control Support

Allows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.

Model Type 1 Type 2
Dimension
[mm]
900(W) X 1100(L) X 212(H) 1000(W) X 1350(L) X 230(H)
Support
Frame
High damping pneumatic spring
Actuator
Force
Vertical 80N / Horizontal 50N
Control
frequency
0.5~1000Hz
Control
DOFs
3 axis 6 DOFs
Required Air
Pressure
0.5 MPa
Required
Voltage
AC 90~230V / 50~60Hz

※ Custom specifications available upon request.

Drawings

Applications (Click to enlarge)

ThermoFisher
Application 1

Helios 5 UC

Application 2

Helios 5 Enclosure

Application 3

Helios PFIB

Application 4

Apreo2S

Application 5

Scios2

Application 6

Verios 5 UC

Hitachi
Application 7

Regulus 8100

Application 8

SU-8600

Application 9

SU-8700

Application 10

SU-9000

Application 11

NX-5000

Zeiss / CIQTEK
Application 12

Sigma 300VP

Application 13

Sigma 300

Application 14

Sigma HD

Application 15

SEM5000X

Application 16

DB550

Application 17

SEM4000Pro

Customise model
Application 18

with custom shape

Application 19

with wide width

Application 20

with breadboard top

Application 21

for access floor

Application 22

for high center of gravity