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VAIS-PB

Base platform type
pneumatic active anti-vibration system
for SEM, TEM, FIB

VAIS-PB

Electron microscopes are inherently sensitive to vibration disturbances transmitted through solid structures.
Passive vibration isolation tables, which have structural resonance zones, can critically compromise the performance of high-resolution electron microscopes by amplifying these disturbances.

VAIS-PB is an active vibration isolation table specifically optimized for electron microscopes, designed to eliminate vibration amplification caused by resonance.

Incorporating a pneumatic support frame with excellent damping characteristics, VAIS-PB ensures stable vibration isolation even under impact vibrations, outperforming competitor models that rely on metal spring support systems.

Since its successful commercialization in 2014—the first of its kind in Korea—VAIS-PB has been widely adopted by major electron microscope manufacturers both domestically and internationally, proving its superior performance.

Specifications

1. Pneumatic Support Frame

The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz..

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Automatic Height Adjustment

Equipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.

5. Remote Control Support

Allows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.

Model Type 1 Type 2
Dimension [mm] 900(W) X 1100(L) X 230(H) 1000(W) X 1400(L) X 230(H)
Support Frame High damping pneumatic spring
Acuator Force Vertical 80N / Horizontal 50N
Control frequency 0.5~1000Hz
Control DOFs 3 axis 6 DOFs
Required Air Pressure 0.5 MPa
Required Voltage AC 90~230V / 50~60Hz

※ Custom specifications available upon request.

Drawings

Applications

Application 1

ThermoFisher Helios 5

Application 2

ThermoFisher Scios

Application 3

ThermoFisher Helios PFIB

Application 4

Hitachi SU-9000

Application 5

Hitachi SU-8700

Application 6

Zeiss Sigma 300 VP

Application 7

Zeiss Sigma 300

Application 8

Tescan MAIA 3