VAIS-SEi
multi-purpose active noise / vibration shielding
clean chamber
Multi-purpose Clean Chamber (VAIS-SEi)
Inspection equipment installed on semiconductor production lines is constantly exposed to severe noise and harsh vibrations from surrounding vibration sources.
Maintaining quiet noise and vibration environments, clean room level cleanliness, and constant temperature control are essential requirements for chambers used for clean room inspection equipment.
VAIS-SEi is a patented technology-integrated product, an acoustic shield enclosure with internal cleanliness control and constant temperature functions.
Combined with active vibration isolation system and temperature/cleanliness adjustment, VAIS-SEi keeps the optimal environment even under severe conditions.
Key Features
Provides a quiet noise environment by completely blocking harsh cleanroom noises using 6-fold sound absorption/insulation layout.
2. Cleanliness Control FunctionThe patented Fan Filter Unit (FFU) system maintains the required internal cleanliness while eliminating noise interference from the fan.
The chiller system prevents internal heat buildup, maintaining the target temperature even in closed, high-heat operations.
4. Vibration Isolation SystemIntegrating AMTEK's active vibration control technology, it perfectly isolates floor-transmitted vibration disturbances.