VAIS-PB
Pneumatic Active Vibration Isolation System
for SEM, TEM,
FIB
High-Load System (VAIS-PB)
Electron microscopes are inherently sensitive to vibration disturbances transmitted through
solid structures.
Passive vibration isolation tables, which have structural resonance
zones, can critically compromise the performance of high-resolution electron microscopes by
amplifying these disturbances.
VAIS-PB is an active vibration isolation table specifically optimized for electron microscopes and designed to eliminate vibration amplification caused by resonance.
Incorporating a pneumatic support frame with excellent damping characteristics, VAIS-PB ensures stable vibration isolation even under impact-induced vibration, outperforming competitor models that rely on metal spring support systems.
Since its successful commercialization in 2014—the first of its kind in Korea—VAIS-PB has been widely adopted by major electron microscope manufacturers both domestically and internationally, proving its superior performance.
Specifications
The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.
2. Superior Low-Frequency Vibration IsolationCombines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.
3. Intuitive Status MonitoringFront LED indicators allow quick and clear assessment of ambient vibration levels and system status.
4. Automatic Height AdjustmentEquipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.
5. Remote Control SupportAllows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.
| Model | Type 1 | Type 2 |
|---|---|---|
| Dimensions [mm] |
900 (W) × 1,100 (L) × 212 (H) | 1,000 (W) × 1,350 (L) × 230 (H) |
| Support Frame |
High-Damping Pneumatic Spring | |
| Actuator Force |
Vertical 80 N / Horizontal 50 N | |
| Control Frequency |
0.5–1,000 Hz | |
| Control DOFs |
3 Axes, 6 DOFs | |
| Required Air Pressure |
0.5 MPa | |
| Required Voltage |
AC 90–230 V / 50–60 Hz | |
※ Custom specifications available upon request.
DrawingsApplications (Click to enlarge)
Helios 5 UC
Helios 5 Enclosure
Helios PFIB
Apreo2S
Scios2
Verios 5 UC
Regulus 8100
SU-8600
SU-8700
SU-9000
NX-5000
Sigma 300VP
Sigma 300
Sigma HD
SEM5000X
DB550
SEM4000Pro
Custom Shape
Extra-Wide Configuration
Optical Breadboard Top
Raised-Floor Installation