VAIS-PB Hero Image

VAIS-PB

Pneumatic Active Vibration Isolation System
for SEM, TEM, FIB


ACTIVE VIBRATION CONTROL

High-Load System (VAIS-PB)

Electron microscopes are inherently sensitive to vibration disturbances transmitted through solid structures.
Passive vibration isolation tables, which have structural resonance zones, can critically compromise the performance of high-resolution electron microscopes by amplifying these disturbances.

VAIS-PB is an active vibration isolation table specifically optimized for electron microscopes and designed to eliminate vibration amplification caused by resonance.

Incorporating a pneumatic support frame with excellent damping characteristics, VAIS-PB ensures stable vibration isolation even under impact-induced vibration, outperforming competitor models that rely on metal spring support systems.

Since its successful commercialization in 2014—the first of its kind in Korea—VAIS-PB has been widely adopted by major electron microscope manufacturers both domestically and internationally, proving its superior performance.

01 / SPECIFICATIONS

Performance & Specifications

1. Pneumatic Support Frame

The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Automatic Height Adjustment

Equipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.

5. Remote Control Support

Allows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.

Model Type 1 Type 2
Dimensions [mm] 900 (W) × 1,100 (L) × 212 (H) 1,000 (W) × 1,350 (L) × 230 (H)
Support Frame High-Damping Pneumatic Spring
Actuator Force Vertical 80 N / Horizontal 50 N
Control Frequency 0.5–1,000 Hz
Control DOFs 3 Axes, 6 DOFs
Required Air Pressure 0.5 MPa
Required Voltage AC 90–230 V / 50–60 Hz

※ Custom specifications available upon request.

02 / APPLICATIONS

Application Archive

Click an image to enlarge.

01

ThermoFisher

Helios 5 UC

Helios 5 UC

Helios 5 Enclosure

Helios 5 Enclosure

Helios PFIB

Helios PFIB

Apreo2S

Apreo2S

Scios2

Scios2

Verios 5 UC

Verios 5 UC

02

Hitachi

Regulus 8100

Regulus 8100

SU-8600

SU-8600

SU-8700

SU-8700

SU-9000

SU-9000

NX-5000

NX-5000

03

Zeiss / CIQTEK

Sigma 300VP

Sigma 300VP

Sigma 300

Sigma 300

Sigma HD

Sigma HD

SEM5000X

SEM5000X

DB550

DB550

SEM4000Pro

SEM4000Pro

04

Customized Models

Custom Shape

Custom Shape

Extra-Wide Configuration

Extra-Wide Configuration

Optical Breadboard Top

Optical Breadboard Top

Raised-Floor Installation

Raised-Floor Installation

High-Center-of-Gravity Equipment

High-Center-of-Gravity Equipment