VAIS-AMT Hero Image

VAIS-AMT

Tabletop
Active Vibration Isolation System

Tabletop System (VAIS-AMT)

VAIS-AMT was the first active vibration isolation table commercialized in Korea, in 2007. It was developed specifically for nanometrology equipment that is sensitive to vibration disturbances, such as atomic force microscopes.

VAIS-AMT delivers isolation performance compliant with the international ultra-low vibration standard, IEST VC-G Class. Its performance has been verified by leading manufacturers of nanometrology equipment, ensuring proven reliability.

Designed to effectively eliminate structural resonance and operate without compressed air, it offers both ease of installation and high stability.

Providing superior performance and cost-efficiency compared to passive systems, VAIS-AMT is an optimal and economical solution for demanding precision environments.

Specifications

1. Easy Installation and Mobility

A metal-spring support design enables easy setup and relocation using only a power connection; no compressed-air supply is required.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Simple On-site Troubleshooting

The digital control system enables users to resolve minor issues on site without technical assistance.

5. Remote Control Support

Control parameters can be adjusted and the system diagnosed remotely without requiring an engineer's visit.

Model AMT-045 AMT-056
Dimensions [mm] 396 (W) × 496 (L) × 110 (H) 496 (W) × 596 (L) × 110 (H)
Self-Weight [kg] 23 [kg] 37 [kg]
Load
Capacity [kg]
0–60 [kg] 0–150 [kg]
Model AMT-067 AMT-078
Dimensions [mm] 596 (W) × 696 (L) × 120 (H) 696 (W) × 796 (L) × 125 (H)
Self-Weight [kg] 56 [kg] 85 [kg]
Load
Capacity [kg]
0–200 [kg] 0–300 [kg]

※ Custom specifications available upon request.

Drawings

Applications (Click to enlarge)

Scanning Probe Microscopy
BRUKER / Multimode8

BRUKER / Multimode8

BRUKER / Innova-SPM

BRUKER / Innova-SPM

BRUKER / BioAFM

BRUKER / BioAFM

BRUKER / Dimension Icon

BRUKER / Dimension Icon

Oxford-Witec / Alpha 300

Oxford-Witec / Alpha 300

Oxford / Cypher

Oxford / Cypher

Electron Microscopy
Thermo Fisher / Phenom ProX

Thermo Fisher / Phenom ProX

Thermo Fisher / Phenom XL

Thermo Fisher / Phenom XL

Thermo Fisher / Phenom Pharos

Thermo Fisher / Phenom Pharos

COXEM / EM30 series

COXEM / EM30 series

COXEM / EM CX series

COXEM / EM CX series

Optical Metrology / Nano Property
Olympus / OLS 5100

Olympus / OLS 5100

Olympus / OLS 4100

Olympus / OLS 4100

Olympus / OLS 5100 LAF

Olympus / OLS 5100 LAF

Olympus / Inverted Microscope

Olympus / Inverted Microscope

Nanosystem / NV Series

Nanosystem / NV Series

Zeiss / Digital Microscope

Zeiss / Digital Microscope

Keyence / 3D Measurement

Keyence / 3D Measurement

Keyence / Laser Microscope

Keyence / Laser Microscope

Interferometer

Interferometer

KLA / Nanoindentation

KLA / Nanoindentation

Probe Station

Probe Station

Precision Balance

Precision Balance