VAIS-PMT Hero Image

VAIS-PMT

Active Vibration Isolation System
with Acoustic Enclosure

Integrated Enclosure (VAIS-PMT)

VAIS-PMT is the world's only integrated pneumatic active vibration isolation system with a built-in acoustic enclosure, offering an innovative solution that simultaneously eliminates vibrations, noise, and airflow disturbances affecting nanometrology equipment.

By integrating an active vibration isolation platform with an acoustic enclosure, VAIS-PMT blocks both structure-borne vibrations and airborne noise and airflow disturbances.

The pneumatic spring-based active isolation frame ensures continuous stability even under severe and irregular impact vibrations, while the multi-layer wall structure of the acoustic enclosure completely blocks noise and airflow.

The VAIS-PMT creates an ideal noise and vibration environment, guaranteeing the target performance of precision equipment.

Specifications

1. Pneumatic Support Frame

The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Automatic Height Adjustment

Equipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.

5. Multi-Layer Acoustic Enclosure

By eliminating airflow disturbances and blocking noise across a wide frequency range, VAIS-PMT provides a controlled measurement environment.

6. Remote Control Support

Allows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.

Model Type 1 Type 2
Dimensions [mm] 760 (W) × 680 (L) ×
745 (H)
760 (W) × 680 (L) ×
895 (H)
Top Plate
Type
Granite (Standard) / Breadboard (Optional)
Support
Frame
High-Damping Pneumatic Spring
Load
Capacity
0–300 kg
Required Air
Pressure
0.5 MPa
Required
Voltage
AC 90–230 V / 50–60 Hz

※ Custom specifications available upon request.

Drawings

Applications (Click to enlarge)

BRUKER Dimension Icon

BRUKER Dimension Icon

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