ACTIVE VIBRATION CONTROL

Integrated Enclosure (VAIS-PMT)

VAIS-PMT is the world's only integrated pneumatic active vibration isolation system with a built-in acoustic enclosure, offering an innovative solution that simultaneously eliminates vibrations, noise, and airflow disturbances affecting nanometrology equipment.

By integrating an active vibration isolation platform with an acoustic enclosure, VAIS-PMT blocks both structure-borne vibrations and airborne noise and airflow disturbances.

The pneumatic spring-based active isolation frame ensures continuous stability even under severe and irregular impact vibrations, while the multi-layer wall structure of the acoustic enclosure completely blocks noise and airflow.

The VAIS-PMT creates an ideal noise and vibration environment, guaranteeing the target performance of precision equipment.

01 / SPECIFICATIONS

Specifications

1. Pneumatic Support Frame

The pneumatic support frame provides superior resistance to harsh impact vibrations compared to competitor models using metal spring support systems.

2. Superior Low-Frequency Vibration Isolation

Combines feedback and feedforward control technologies to effectively isolate vibrations below 10 Hz.

3. Intuitive Status Monitoring

Front LED indicators allow quick and clear assessment of ambient vibration levels and system status.

4. Automatic Height Adjustment

Equipped with height sensors, the system automatically maintains a level position even when the load has an uneven center of gravity.

5. Multi-Layer Acoustic Enclosure

By eliminating airflow disturbances and blocking noise across a wide frequency range, VAIS-PMT provides a controlled measurement environment.

6. Remote Control Support

Allows remote adjustment of control parameters and system diagnostics without requiring an engineer's visit.

Model	Type 1	Type 2
Dimensions [mm]	760 (W) × 680 (L) × 745 (H)	760 (W) × 680 (L) × 895 (H)
Top Plate Type	Granite (Standard) / Breadboard (Optional)
Support Frame	High-Damping Pneumatic Spring
Load Capacity	0–300 kg
Required Air Pressure	0.5 MPa
Required Voltage	AC 90–230 V / 50–60 Hz